Eunah Kim, Yunae Cho, Kwang-Tae Park, Jun-Hyuk Choi, Seung-Hyuk Lim, Yong-Hoon Cho, Yoon-Ho Nam, Jung-Ho Lee and Dong-Wook Kim
Abstract
We fabricated 8-in. Si nanocone (NC) arrays using a nanoimprint technique and investigated their optical characteristics. The NC arrays exhibited remarkable antireflection effects; the optical reflectance was less than 10% in the visible wavelength range. The photoluminescence intensity of the NC arrays was an order of magnitude larger than that of a planar wafer. Optical simulations and analyses suggested that the Mie resonance reduced effective refractive index, and multiple scattering in the NCs enabled the drastic decrease in reflection.
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